JPH0215545Y2 - - Google Patents
Info
- Publication number
- JPH0215545Y2 JPH0215545Y2 JP19291684U JP19291684U JPH0215545Y2 JP H0215545 Y2 JPH0215545 Y2 JP H0215545Y2 JP 19291684 U JP19291684 U JP 19291684U JP 19291684 U JP19291684 U JP 19291684U JP H0215545 Y2 JPH0215545 Y2 JP H0215545Y2
- Authority
- JP
- Japan
- Prior art keywords
- air
- duct
- air supply
- sub
- air purification
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004887 air purification Methods 0.000 claims description 19
- 239000004065 semiconductor Substances 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 8
- 230000007723 transport mechanism Effects 0.000 description 7
- 230000032258 transport Effects 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19291684U JPH0215545Y2 (en]) | 1984-12-21 | 1984-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19291684U JPH0215545Y2 (en]) | 1984-12-21 | 1984-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61111518U JPS61111518U (en]) | 1986-07-15 |
| JPH0215545Y2 true JPH0215545Y2 (en]) | 1990-04-26 |
Family
ID=30750329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19291684U Expired JPH0215545Y2 (en]) | 1984-12-21 | 1984-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0215545Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2582866B2 (ja) * | 1988-07-11 | 1997-02-19 | 株式会社竹中工務店 | 危険薬品使用工場等用クリーンルームの給排気方法 |
-
1984
- 1984-12-21 JP JP19291684U patent/JPH0215545Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61111518U (en]) | 1986-07-15 |
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